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Dalius Jucius
 

Contact info:

Dr. Dalius Jucius
Senior Researcher of Department of Microlithography at the Institute of Physical Electronics of Kaunas University of Technology
Savanorių 271, 50131 Kaunas, Lithuania
Phone: +370 37 313432; +370 37 327605
Fax:     +370 37 314423
E-mail:
Web: www.fei.ktu.lt


Dalius Jucius was born in Molėtai, Lithuania, in 1970.
He has graduated Kaunas University of Technology in 1993 receiving diploma of engineer in radiotechnics and MSc. degree in Electronics Engineering also at Kaunas University of Technology in 1994.
1999 Awarded Degree of Ph.D. in Electrical and Electronics Engineering.
1994 Researcher at Ultrasound Institute of Kaunas University of Technology;
1999 Senior Researcher at the Institute of Physical Electronics of Kaunas University of Technology also he is a Scientific Secretary of the Institute of Physical Electronics of Kaunas University of Technology in 2004;
He is a reviewer of the scientific journal "Materials Science (Medžiagotyra).

Field of scientific studies:

Thin film technology, vacuum and plasma processes, imprint lithography, photonic crystals, ultrasonic measurements.
Dr. Dalius Jucius has authored or co-authored over 30 scientific publications.

Recent publications (2002-2007): 

  • Kopustinskas V., Grigaliūnas V., Jucius D., Mizarienė V. Synthesis of a-C:H and a-CNx:H films by direct ion beam // Materials Science (Medžiagotyra), Kaunas: Technologija, 2002, Vol. 8, No. 2, p.161-165.
  • Meškinis Š., Šlapikas K, Gudaitis R., Pucėta M., Puišo J., Jucius D., Matukas J. Formation of the low effective barrier height Co-nGaAs Schottky contact // Materials Science (Medžiagotyra), Kaunas: Technologija, 2002, Vol. 8, No. 4, p. 341-344.
  • Grigaliūnas V., Tamulevičius S., Kopustinskas V., Gudonytė A., Jucius D., Naujokaitis R. Fabrication of photonic pillars by imprint lithography // Materials Science (Medžiagotyra), Kaunas: Technologija, 2002, Vol. 8, No. 4, p. 345-347.
  • Jucius D., Narmontas P., Grigaliūnas V., Žunda A. Surfacing technology of steel-based anilox rolls // Materials Science (Medžiagotyra), Kaunas: Technologija, 2002, Vol. 8, No. 4, p. 403-406.
  • Grigaliūnas V., Tamulevičius S., Niaura G., Kopustinskas V., Gudonytė A., Jucius D. Imprint lithography of pyramidal photonic pillars using hydrazine etching // Physica E, 2003, Vol.16, No. 3-4, p. 568-573.
  • Jucius D., Grigaliūnas V., Guobienė A. Influence of imprint conditions on the quality of submicron scale imprinted patterns // Materials Science (Medžiagotyra), Kaunas: Technologija, 2003, Vol.9 , No. 4, p. 321-323.
  • Jucius D., Grigaliūnas V., Guobienė A. Rapid evaluation of imprint quality using optical scatterometry // Microelectronic Engineering, 2004, Vol. 71, No. 2, p. 190-196.
  • Grigaliūnas V., Tamulevičius S., Tomašiūnas R., Kopustinskas V., Guobienė A., Jucius D. Laser pulse assisted nanoimprint lithography // Thin Solid Films, 2004, Vol. 453-454, p. 13-15.
  • Grigaliūnas V., Jucius D., Tamulevičius S., Guobienė A., Kopustinskas V. Optically variable imaging using nanoimprint technique // Applied Surface Science, 2005, Vol. 245, No. 1-4, p. 234-239.
  • Grigaliūnas V., Tamulevičius S., Muehlberger M., Jucius D., Guobienė A., Kopustinskas V., Gudonytė A. Nanoimprint lithography using IR laser irradiation // Applied Surface Science, 2006, Vol. 253, No. 2, p. 646-650.
  • Tamulevičius S., Grigaliūnas V., Jucius D., Ostaševičius V., Palevičius A., Janušas G. Thermal stress kinetics in the microresist-silicon systems // In “Emerging Lithographic Technologies” M. J. Lercel, F. M. Schellenberg, eds., Proc. SPIE, 2006, Vol. 6151, p. 715-720.

 

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