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Viktoras Grigaliūnas
 

Contact info:

Dr. Viktoras Grigaliūnas
Senior Researcher and Head of Department of Microlithography at the Institute of Physical Electronics of Kaunas University of Technology
Savanorių 271, 50131 Kaunas, Lithuania
Phone:  +370 37 313432
Fax:      +370 37 314423
E-mail:
Web: www.fei.ktu.lt


Viktoras Grigaliūnas was born in Kaunas, Lithuania, in 1960.
He has graduated Kaunas Politechnical Institute in 1983 receiving a diploma of engineer in microelectronics.
In 1996 he has defended Ph.D. Thesis titled “Elionic technology for the fabrication of the microoptical structures”.
From 1996 he is a Senior Researcher and Head of Department of Microlithography at the Institute of Physical Electronics of Kaunas University of Technology.
1997-2001 and from 2003 he is Chairman of council of Institute of Physical Electronics of Kaunas University of Technology.
From 2006 he is an Associate Professor at the International Studies Center of Kaunas University of Technology.
He is a member of the united PhD studies Commission at Kaunas University of Technology in the field of Materials Science (08T), expert of Lithuanian State Science and Studies Foundation.

Field of scientific studies:

Microelectromechanical systems, photonic bandgap crystals, nanoimprint, UV and EB lithography, scanning electron microscopy, optical document security.
Dr. Viktoras Grigaliūnas has authored or co-authored over 100 scientific publications.

Recent publications (2002-2007): 

  • Mikulskas, J. Mickevičius, J. Vaitkus, R. Tomašiūnas, V. Grigaliūnas, V. Kopustinskas, Š. Meškinis. Fabrication of photonic structures by means of interference lithography and reactive ion etching // Applied Surface Science. ISSN: 0169-4332, Vol. 186 (2002), p. 599-603.

  • V. Kopustinskas, Š. Meškinis, V. Grigaliūnas, S. Tamulevičius, M. Pucėta, G. Niaura, R. Tomašiūnas. Ion beam synthesis of a-CNx:H films // Surface and Coatings Technology. ISSN: 0257-8972, Vol. 151-152 (2002), p. 180-183.

  • V. Grigaliūnas, S. Tamulevičius, G. Niaura, V. Kopustinskas, A. Gudonytė, D. Jucius. Imprint Litography of Pyramidal Photonic Pillars using Hydrazine Etching // Physica E. ISSN: 1386-9477, Vol. 16 (2003) 568-573.

  • V. Kopustinskas, Š. Meškinis, S. Tamulevičius, G. Niaura, A. Guobienė, V. Grigaliūnas. Direct ion beam deposited carbon films and clusters // Vacuum. ISSN: 0042-207X, Vol. 72 (2004) 193-198.

  • M. Margelevičius, V. Grigaliūnas, H. Pranevičius, J. Margelevičius. Modelling of relief of phase reflection diffraction grating // Applied Mathematical Modelling. ISSN: 0307-904X, Vol. 27 (2003), 1035-1049.

  • D. Jucius, V. Grigaliūnas, A. Guobienė. Rapid evaluation of imprint quality using optical scatterometry // Microelectronic Engineering. ISSN: 0167-9317, Vol. 71 (2004), 190-196.

  • V. Grigaliūnas, S. Tamulevičius, R. Tomašiūnas, V. Kopustinskas, A. Guobienė, D. Jucius. Laser Pulse Assisted Nanoimprint Lithography // Thin Solid Films. ISSN: 0040-6090, 453 - 454 (2004) 13–15.

  • V.Ostaševicius, S.Tamulevičius, A.Palevičius, M.Ragulskis, R.Palevičius, V.Grigaliūnas. Hybrid numerical – experimental approach for investigation of dynamics of micro cantilever relay system // Optics and Lasers in Engineering. ISSN: 0143-8166, Vol. 43 (2005), 63-73.

  • V. Grigaliūnas, D. Jucius, S. Tamulevičius, A. Guobienė. Optically Variable Imaging using Nanoimprint Technique // Applied Surface Science. ISSN: 0169-4332, Vol. 245, No. 1-4 (2005), 234-239.

  • Vytautas Ostasevicius, Sigitas Tamulevicius, Arvydas Palevicius, Minvydas Ragulskis, Viktoras Grigaliunas, Virgilijus Minialga. Synergy of contact and noncontact techniques for design and characterization of vibrating MOEMS elements // J. Microlith., Microfab., Microsyst. 4(4), 041602 (Oct–Dec 2005).

  • Š. Meškinis, V. Kopustinskas, K. Šlapikas, S. Tamulevičius, A. Guobienė, R. Gudaitis, V. Grigaliūnas. Ion beam synthesis of the diamond like carbon films for nanoimprint lithography applications // Thin Solid Films. ISSN: 0040-60902006, Vol. 515, Issue 2 (October 2006), 636-639 (special issue devoted to the 13th International Congress on Thin Films / 8th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures, June 19-23 2005 Stockholm).

  • V. Grigaliūnas, S. Tamulevičius, M. Mühlberger, D. Jucius, A. Guobienė, V. Kopustinskas, A. Gudonytė. Nanoimprint Lithography Using IR Laser Irradiation // Applied Surface Science. ISSN: 0169-4332. Vol.253, Issue 2 (2006), p. 646-650.

  • Vytautas Ostasevicius, Vytautas Bagdonas, Sigitas Tamulevičius,  Viktoras Grigaliunas. Analysis of a Microelectrostatic Motor // Trans. Tech. Publications, Switzerland: Solid State Phenomena. ISSN: 1012-0394, Vol. 113 (2006), 185-189.

  • V. Kopustinskas, V. Grigaliūnas, D. Jucius, Š.Meškinis, M. Margelevičius, R. Tomašiūnas. a-C:H Films for Photonic Structures Fabrication. - Presented at the International conference ADOM-2 // Proc SPIE., ISSN 0277-786X, 2001, V. 4318, p. 295-300. [ISI Proceedings].

  • Vytautas Ostasevicius, Rolanas Dauksevicius, Sigitas Tamulevicius, Algimantas Bubulis, Viktoras Grigaliūnas, Arvydas Palevicius. Design, fabrication, and simulation of cantilever type electrostatic micromechanical switch. Proc. SPIE Vol. 5763, p. 436-445, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; Vijay K. Varadan; Ed. [ISI Proceedings].

  • S. Tamulevicius, V. Grigaliunas, D. Jucius, V. Ostasevicius, A. Palevicius, and G. Janusas. Thermal stress kinetics in the microresist-silicon system. Proc. SPIE, Vol. 6151 (2006),  p. 715-720. [ISI Proceedings].

  • S. Tamulevičius, L. Augulis, Š. Meškinis, V. Grigaliūnas, Mechanical properties of carbon thin films, in: NATO Science Series II: Mathematics, Physics and Chemistry: Frontiers of Multifunctional Integrated Nanosystems (Ed.: E. Buzaneva, Peter Scharff), ISBN 1-4020-2173-9. Kluwer Academic Publishers, Dordrecht, 2004, Vol. 152, Chapter 4, pp. 185-196. [ISI Proceedings].

  • Jarimavičiūtė-Žvalionienė, Renata; Tamulevičius, Sigitas; Andrulevičius, Mindaugas; Tomašiūnas, Rolandas; Grigaliūnas, Viktoras; Meškinis, Šarūnas. Photoluminescence and XPS study of selenium treated porous silicon // Nanostructured and Advanced Materials for Applications in Sensor, Optoelectronic and Photovoltaic Technology / edited by A. Vaseashta, D. Dimova-Malinovska, J.M. Marshall. Dordrecht: Springer, 2005. ISBN 1-4020-3560-6. pp. 371-374. [ISI Proceedings].

  • G. Vanagas, V. Sinkevičius, M. Mikolajūnas, D. Viržonis, V. Grigaliūnas. FEM simulation of harsh environment cMUT design. Proceedings of the 6th International Conference “Vibroengineering 2006”. Kaunas: Technologija, 2006, p. 203-206. [ISI Proceedings].

  • R. Jarimavičiūtė-Žvalionienė,  S. Tamulevičius, V. Aninkevičius, V. Grigaliūnas, R. Tomašiūnas. Study of photoluminescence in gadolinium chloride treated porous silicon structures // Journal of Optoelectronics and Advanced Materials, Vol. 9, No. 1 (2007), p. 162-165.

  • Renata Jarimavičiūtė-Žvalionienė, Sigitas Tamulevičius, Mindaugas Andrulevičius, Gintarė Statkute, Rolandas Tomašiūnas, Viktoras Grigaliūnas. Effects of Selenium Treatment on Composition and Photoluminescence Properties of Porous Silicon // Journal of Luminescence, Vol. 127, Issue 2 (2007), p. 431-434

 

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