|
SEM microphotograph of
diffraction grating in crystalline silicon
 
Mark size 10 µm
Fields of application
Available materials and
geometry of gratings
|
Substrate and materials |
Silicon, quartz glass, polymer, polymer on
glass, silicon |
|
Form |
Rectangular (of large period)
Trapeze
Sinusoidal (of small period, in polymer) |
|
Period
(d) |
After customer request (from 4 µm and
greater)
(sinusoidal profile from 0,3
µm) |
|
Depth (h) |
After customer request (to 1 µm) |
|
Filling |
After customer request (maximum15x15
mm ) |
Accomplished requests:
-
Wavefront splitters (on request by VU MTMI (Institute of
Material Science and Applied Research)
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Photonic crystal micro-resonators On request by VU FF KEK
(Laser Research Centre, Department of Quantum Electronics of Vilnius University)
Main
publications
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Jarasiunas, K.; Aleksiejunas, R; Malinauskas, T.; Gudelis, V.; Tamulevicius, Tomas; Tamulevicius, Sigitas; Guobiene, Asta; Usikov, A.; Dmitriev, V.; Gerritsen, H.J. Implementation of diffractive optical element in four-wave mixing scheme for ex situ characterization of hydride vapor phase epitaxy-grown GaN layers // Review of Scientific Instruments. - ISSN 0034-6748. - Melville. - 2007, Vol. 78, no. 3, p. Art. No.033901.
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Tamulevičius, Tomas; Andrulevičius, Mindaugas; Kopustinskas, Vitoldas; Guobienė, Asta; Šileikaitė, Asta; Gudonytė, Angelė; Puodžiukynas, Linas; Tamulevičius, Sigitas. Aplication of plasma chemical etching in control of optical properties of multilayered dielectric gratings // Materials science = Medžiagotyra / Kaunas University of Technology, Academy of Sciences of Lithuania. - ISSN 1392-1320. - Kaunas. - 2008, Vol. 14, no. 3, p. 198-201.
>>
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Peckus, M.; Rogalskis, R.; Andrulevicius, M.; Tamulevicius, T.; Guobiene, A.; Jarutis, V.; Sirutkaitis, V.; Staliunas, K. Resonators with manipulated diffraction due to two- and three-dimensional intracavity
photonic crystals // Physical Review A, Volume 79, Number 3, March 2009, 033806.
>>
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