Research directions

•  Development and application of microtechnologies

•  Investigation of thin films and coatings

•  Synthesis and investigation of nanocomposites and nanostructures

•  Design and applications of microrelief patterns

  Projects

  Our products

 Micromechanical electrostatic relay

PC based cooling-heating unit

Difractive Marks For Security Applications

Optical micro-electromechanical device (OMED)

Microelectromechanical motor (surface micromachining process using lithographic UV-exposure of thick photoresist and electroplating)

Diffraction gratings

other

  Main publications