Administration Research Laboratory of Surfaces and Thin Films Microlithography Research Laboratory Research Laboratory of Vacuum Processes Research Laboratory of Physical and Chemical Analysis Research Laboratory of Development and Implementation Administration Director prof. habil. dr. Sigitas Tamulevičius Vice-director Assoc prof. dr Eglė Fataraitė Administrator Virginija Sinkevičienė Research Laboratory of Surfaces and Thin Films Head of Labaratory Senior researcher dr. Mindaugas Andrulevičius  Senior researcher dr. Saulius Šeržentas Associate researcher Mindaugas Pucėta       Associate researcher Ph. D. student Tomas Tamulevičius     Microlithography Research Laboratory Head of Labaratory Senior researcher dr. Viktoras Grigaliūnas Senior researcher dr. Dalius Jucius Senior resarcher dr. Asta Guobienė   Associate researcher Angelė Gudonytė Engineer Jurijus Čerepanovas   Research Laboratory of Vacuum Processes     Head of Labaratory Senior researcher dr. Šarūnas Meškinis Senior researcher dr. Kęstutis Šlapikas Associate researcher Vitoldas Kopustinskas   Associate researcher dr. Rimantas Gudaitis Associate researcher Ph. D. student Asta Tamulevičienė   Ph. D. student Edvinas Navickas   Senior technician Albinas Svirskis Laboratory Assistant Andrius Vasiliauskas   Research Laboratory of Physical and Chemical Analysis Head of Labaratory Senior researcher dr. Igoris Prosyčevas Dipl. engineer Nijolė Liucija Stučinskienė Dipl. engineer  Valentinas Baltrušaitis     Technician Irina Abelit   Post-doctoral fellow dr. Renata Jarimavičiūtė-Žvalionienė        Research Laboratory of Development and Implementation Head of Department dr. Pranas Narmontas Dipl. Engineer Vladimiras Čižas Dipl. engineer Algimantas Juraitis       Technician Vilija Kuprėnienė