The machine is used for mask alignment and exposure on one side. Automatic, manual and adjustment modes are possible. Loading/unloading is motorized by a stepping motor.
Exposure time: 0 s – 30 min
Maximal diameter of substrate: 143 mm
Inscribed area: 101.6 × 101.6 mm
Substrate thickness: 0 – 10 mm
Mask: 203.2 × 203.2 mm
Mask holder
            movement along XY: ± 3 mm
            rotation: ± 3 degrees
            sensitivity: 1/1000 degree
Chuck
            motorized XY motion: ± 0,3 mm
            rotation: ± 2.5 degrees
            sensitivity: 0,1/1000 degree